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- Article name
- Miniature system of creation of vacuum of electronic-probe devices
- Authors
- Vasin V. A., , vasichtv@yandex.ru; vacuumwa@list.ru, Moscow State Institute of Electronics and Mathematics, 3, B. Trekhsvyatitel'skiy trudged, Moscow, 109028, Russia
Vasichev B. N., , vasichtv@yandex.ru; vacuumwa@list.ru, Moscow State Institute of Electronics and Mathematics, 3, B. Trekhsvyatitel'skiy trudged, Moscow, 109028, Russia
Stepanchikov S. V., , vasichtv@yandex.ru; vacuumwa@list.ru, Moscow State Institute of Electronics and Mathematics, 3, B. Trekhsvyatitel'skiy trudged, Moscow, 109028, Russia
- Keywords
- electron probe devices / cathode-ray micro device / miniature vacuum system / frameless vacuum valve / miniature vacuum valve / metalhydride vacuum pump / the bellows vacuum pump / the bellows-bucket vacuum pump / the membrane vacuum pump
- Year
- 2010 Issue 3 Pages 132 - 139
- Code EDN
- Code DOI
- Abstract
- Prospects of creation of tiny electron-beam systems. Designs of tiny base elements of electron-optical systems are submitted. Including a magnetic lens with open-ended of the core and lenses with combined electric and magnetic fields at which the core simultaneously carries out functions of electrodes of an electrostatic lens. Results of their research are resulted. Results of research high-speed 1 coil rejecting systems without the core and with the core, and also stigmator are submitted. Essentially new approaches to designing tiny electron-optical systems which allow to increase efficiency of formation of electronic beams are considered and to provide transition to manufacturing techniques of vacuum micro system technical equipment and nana technology. The new tiny vacuum systems for use in the given devices are given.
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