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- Article name
- ACTIVATION OF PROCESS QAS-PHASE SEDIMENTATION OF NITRIDE OF THE TITAN BY ATOMS OF NITROGEN
- Authors
- Manzha N. M., , , Technological Centre, Moscow Institute of Electronic Technology (Technical University), Russia
- Keywords
- qas-cycle sedimentation of nitride of the titan by activation by atoms of nitrogen / activation of pro- cess / gas-cycle sedimentation of nitride of the titan / the lowered pressure / the generator of atomic nitrogen / stean-gas mixsture
- Year
- 2010 Issue 1 Pages 88 - 93
- Code EDN
- Code DOI
- Abstract
- Influence of atomic nitrogen on process of sedimentation of nitride of the titan is investigated at the lowered pressure stean-gas mixture. Application of atomic nitrogen for sedimentation nitridinq metal layers has allowed to lower temperature sedimentation. Resistance of the received layers can be adjusted concentration of nitrogen in the last and his(its) thickness. Nitridinq metal layers can be used as not penetrating contacts to areas of transistor structures and adhesive layers at formation of multilayered distributing VLSI in submicronic technology.
- Text
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