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- Article name
- Termomechanical nanomembrane IR-imaging sensors
- Authors
- Fedirko V. A., , vfed@mail.ru, MIEE, Zelenograd, Moscow, 5 Passage 4806, 124498, Zelenograd, Moscow, Russia
Fetisov E. A., , , MIEE, Zelenograd, Moscow, 5 Passage 4806, 124498, Zelenograd, Moscow, Russia
Bespalov V. A., , , MIEE, Zelenograd, Moscow, 5 Passage 4806, 124498, Zelenograd, Moscow, Russia
- Keywords
- analysis / thermal receivers / nanodimensional membranes / infra-red technics
- Year
- 2010 Issue 1 Pages 66 - 72
- Code EDN
- Code DOI
- Abstract
- The state-of-the-art of uncooled bimorph nanomembrane IR-image sensors are analyzed. Optimization and ultimate characteristics and are discussed. Prospects for use of microoptoelectromechanical systems (MOEMS) in IR-devices are estimated.
- Text
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