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- Article name
- THE INVESTIGATION OF STRUCTURAL AND PHYSICOCHEMICAL FEATURES OF BOROSILICATE GLASSES FOR MICRO ELECTROMECHANICAL SYSTEMS
- Authors
- Timoshenkov S. P., , , ,
Kalugin V. V., , , ,
Minaev V. S., , , ,
Novikov S. N., , , ,
Suhorukov D. O., , , ,
- Keywords
- glass / micro electromechanical systems / Fourier transform infrared spectroscopy / phase composition / polymorphous modification / borosilicate glass / silicon-on-insulator
- Year
- 2009 Issue 4 Pages 36 - 43
- Code EDN
- Code DOI
- Abstract
- The differences at structure and phase composition of borosilicate glasses used in technologies of silicon-on-insulator (SOI) and micro electromechanical systems (MEMS) were investigated by a Fourier transform infrared spectroscopy. The significant difference in technological behavior of the domestic Russian borosilicate glasses of the same mark from different suppliers and also their foreign analogue was noted. The relationship between technological behavior of glasses and differences at composition and structure obtained in infrared spectra of glasses was revealed.
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