To obtain access to full text of journal and articles you must register!
- Article name
- RESEARCH AND SIMULATION GAS-DYNAMIC CHARACTERISTICS OF EPITAXIAL REACTOR
- Authors
- Pogalov A. I., , dtm@miee.ru, Moscow Institute of Electronic Technology (Technical University), Moscow, Russia
Timofeev V. N ., , dtm@miee.ru, Moscow Institute of Electronic Technology (Technical University), Moscow, Russia
Kravchenko A. A., , , National Research University of Electronic Technology, Moscow, Russian
- Keywords
- modeling / development / gas-dynamic characteristics / epitaxial reactor / the reactor slotted diffuser / a substrate holder
- Year
- 2013 Issue 4 Pages 14 - 17
- Code EDN
- Code DOI
- Abstract
- Presents results of computer simulation of gas-dynamic flow characteristics in epitaxial reactor. Considered three types of slot reactor: prismatic, diffuser and with an elongated substrate holder. Developed scientific and technical recommendations on the design of the reactor.
- Text
- To obtain access to full text of journal and articles you must register!
- Buy
