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- Article name
- STUDY OF THE HEAT TRANSFER COEFFICIENT THERMAL CONDUCTIVITY DETECTOR, BASED ON MEMS TECHNOLOGIES
- Authors
- Pogalov A. I., , dtm@miee.ru, Moscow Institute of Electronic Technology (Technical University), Moscow, Russia
Timofeev V. N ., , dtm@miee.ru, Moscow Institute of Electronic Technology (Technical University), Moscow, Russia
Terehin I. V., , Terehin-gas@yandex.ru, Moscow Institute of Electronic Technology (Technical University) , Moscow, Russia
- Keywords
- thermal conductivity detector / MEMS-technology / heat transfer / similarity criteria
- Year
- 2013 Issue 4 Pages 63 - 66
- Code EDN
- Code DOI
- Abstract
- Developed a thermal conductivity detector using MEMS-technology for use in capillary gas chromatography. The study of the heat transfer coefficient depends on the geometry of the sensor and the physical properties of the gas. Found that the greatest influence on the heat transfer is the size of probes and thermal conductivity of the gas. The prototype thermal conductivity detector was created.
- Text
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