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- Article name
- Polycrystal diamond growth in the microwave plasma torch
- Authors
- Sergeichev K. F., , kserg@fpl.gpi.ru, General Physics Institute named after A. M. Prohorov, RAS, 38 Vavilov str., Moscow, 119991, Russia
Bolshakov A. P., , bolshak@ran.gpi.ru, Prokhorov General Physics Institute, Russian Academy of Sciences, 38 Vavilov str., Moscow, 119991, Russia
Ralchenko V. G., , , Prokhorov General Physics Institute, Russian Academy of Sciences, 38 Vavilov str., Moscow, 119991, Russia
Lukina N. A., , , Prokhorov General Physics Institute, 38 Vavilov str., Moscow, 119991, Russia
Arutiunian N. R., , , A. M. Prokhorov General Physics Institute of the RAS, 38 Vavilov str., 119991, Moscow, Russia
Vlasov I. I., , , A. M. Prokhorov General Physics Institute of the RAS, 38 Vavilov str., 119991, Moscow, Russia
- Keywords
- microwave discharge / mix of gases / diamond / plasma / torch / film / optical spectrum
- Year
- 2009 Issue 6 Pages 107 - 113
- Code EDN
- Code DOI
- Abstract
- Diamond films of different structures on quartz, alloy VK-6 and molybdenum substrates were deposed by CVD-method in the MPT (microwave plasma torch) jet discharge in gas mixture (argon-hydrogen-methane) at atmosphere pressure. Views of the diamond polycrystal film, separate crystalits and Raman spectroscopy data are presented. The MPT-optic spectra at conditions of diamond growth process showed presence of intense emission of Hα hydrogen and radical strips C2, famous as Swan atrips.
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