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- Article name
- Ion flux on non-conducting surface at beam plasma discharge: calculation and experiment
- Authors
- Shustin E. G., , shustin@ms.ire.rssi.ru, V. A. Kotelnikov Institute of Radio Engineering and Electronics of RAS Fryazino branch, 1 Vvedensky sq., 141190, Fryazino, Moscow Region, Russia
Kurnaev V. A., , kurnaev@plasma.mephi.ru, Moscow Engineering Physics Institute, 31 Kashirskoye road, 115409, Moscow, Russia
Peskov V. V., , , Kotelnikov Institute of Radio Engineering and Electronics of RAS, Fryazino branch, 1 Vvedensky sq., 141190, Fryazino, Moscow Region, Russia
Chmil A. I., , , Kotelnikov Institute of Radio Engineering and Electronics of RAS, Fryazino branch, 1 Vvedensky sq., 141190, Fryazino, Moscow Region, Russia
- Keywords
- ionic stream / beam plasma discharge / surface / calculation / experiment
- Year
- 2009 Issue 6 Pages 118 - 122
- Code EDN
- Code DOI
- Abstract
- The computer calculation of model of plasma sheath near non-conducting surface at beam-plasma discharge at low magnetic field has been carried out. An accuracy of computer calculation results has been confirmed by experimental data. A regime for optimum etching of GaAs has been chosen based on the calculations. Also the computer calculation of model of ion flux interaction with non-conducting surface for carbon-like sputtering regimes has been performed.
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