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- Article name
- MATHEMATICAL MODEL OF MEASUREMENT CONTROL PARTICLE CONCENTRATIONS IN THE CLEANROOM
- Authors
- Sevryukova E. A., , melaly@mail.ru, National Research University of Electronic Technology, Moscow, Russia
- Keywords
- optical methods / the concentration of particles / spherical particle / clean room / indicatrix / aerosol
- Year
- 2015 Issue 3 Pages 49 - 53
- Code EDN
- Code DOI
- Abstract
- The article summarizes the methods and means of measuring the concentration of aerosol particles in the clean room technology industry, developed a mathematical model of the measurement control, which takes into account the scattering indicatrix separate spherical particles using the mathematical apparatus of the Mie theory.
- Text
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