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- Article name
- Multifunctional system for the production of microelectronic components and computer cathode-ray optics
- Authors
- Vasin V. A., , vacuumwa@list.ru, Moscow State Institute of Electronics and Mathematics, 3 B. Trekhsvyatitelsky Lane, Moscow, 109028, Russia
Vasichev B. N., , vasichev@yandex.ru, vacuumwa@list.ru, Moscow State Institute of Electronics and Mathematics, 3 B. Trekhsvyatitelsky Lane, Moscow, 109028, Russia
Stepanchikov S. V., , vacuumwa@list.ru, Moscow State Institute of Electronics and Mathematics, 3 B. Trekhsvyatitelsky Lane, Moscow, 109028, Russia
Fatjanova N. G., , vacuumwa@list.ru, Moscow State Institute of Electronics and Mathematics, 3 B. Trekhsvyatitelsky Lane, Moscow, 109028, Russia
- Keywords
- miniaturization of electron-beam equipment / multibeam system / multifunctional system / the radiation load / miniature vacuum pump assembly / coordinate table / introduced by defects
- Year
- 2011 Issue 4 Pages 126 - 131
- Code EDN
- Code DOI
- Abstract
- The advantages and different possibilities of designing and developing multi multibeam electron-beam equipment brought by without defects, with low radiation exposure to the object to be processed in the manufacture of microelectronic devices, and computer cathode-ray optics and system integrators devices.
- Text
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