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- Article name
- Alternative transporting devices for ecologically perfect vacuum equipment of electronic technics
- Authors
- Kuznetsov A. E., , KEA@tcen.ru, SMC "Technological Centre", MIET, Moscow, Russia
VASIN V. A., , vacuumwa@ya.ru, vacuumwa@list.ru, Moscow State Institute of Electronics and Mathematics, Moscow, Russia
IVASHOV E. N., , ienmiem@mail.ru, Moscow State Institute of Electronics and Mathematics, Moscow, Russia
STEPANCHIKOV S. V., , vacuumwa@ya.ru, Moscow State Institute of Electronics and Mathematics, Moscow, Russia
- Keywords
- ecologically perfect industrial equipment / the vacuum equipment of electronic technics / transporting means / contactless magnetic interaction / steered elastic deformation / Introduced pollution / deterioration micro particles
- Year
- 2011 Issue 4 Pages 69 - 74
- Code EDN
- Code DOI
- Abstract
- Tendencies of development of modern transporting means for ecologically perfect vacuum equipment of electronic technics are considered. It is shown that alternative transporting means of the equipment are the mechanical systems constructed on principles of contactless magnetic interaction and steered elastic deformation. The technique and results of calculation of devices on introduced pollution by deterioration microparticles in the controllable vacuum environment is presented. Such approach provides creation of the non-polluting equipment in the industry of high vacuum technologies.
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