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- Article name
- THE DEVELOPMENT OF ACTUATOR BASED ON BIMORPH STRUCTURE AND MICROMIRROR DESIGN BASED ON IT
- Authors
- Evstafyev S. S., , madcatse@gmail.com, Moscow Institute of Electronic Technology (Technical University), Moscow, Russia
- Keywords
- thermoactuator / bimorph structure / micromirror device
- Year
- 2011 Issue 4 Pages 33 - 38
- Code EDN
- Code DOI
- Abstract
- The principle of action of thermoactuator based on bimorph structures SiO2/Al is considered and the design it is developed. Design and manufacturing technology for micromirror device uising an isotropic plasma etching on the front side through a mask of dielectrics is proposed for use with current microelectronic facilities.
- Text
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