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- Article name
- ANALYSIS OF MODERN SYSTEMS OF AIR-CONDITIONING TECHNOLOGY IN CLEAN ROOMS
- Authors
- Sevryukova E. A., , melaly@mail.ru, National Research University of Electronic Technology, Moscow, Russia
- Keywords
- atmosphere / air / clean room / ciller / climatization system
- Year
- 2013 Issue 1 Pages 73 - 76
- Code EDN
- Code DOI
- Abstract
- This article focuses on the stabilization of the temperature and humidity in clean rooms of micro- and nanoelectronics. Reviewed technical solutions and systems ensure the strictest workplace clean rooms and, in particular, is a discussion of the various regimes of cooling and drying air.
- Text
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