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- Article name
- Models of coagulation and mechanism of growth of agglomerates in clean rooms of microelectronics
- Authors
- Sevryukova E. A., , melaly@mail.ru, National Research University of Electronic Technology, Moscow, Russia
- Keywords
- coagulation / aerosol / model / Smoluchowski equation / agglomerate / clean room
- Year
- 2012 Issue 5 Pages 37 - 41
- Code EDN
- Code DOI
- Abstract
- This article is devoted to the mathematical description of the distribution of the sizes of agglomerates research aerosol particle collision mechanism options with different masses, model analysis based on coagulation of elementary particle colliding of two aerosol microclimate parameters change in net space microelectronics.
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