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- Article name
- Growth of the single crystal diamond in microwave plasma
- Authors
- Bolshakov A. P., , bolshak@ran.gpi.ru, Prokhorov General Physics Institute, Russian Academy of Sciences, 38 Vavilov str., Moscow, 119991, Russia
Ralchenko V. G., , , Prokhorov General Physics Institute, Russian Academy of Sciences, 38 Vavilov str., Moscow, 119991, Russia
Polskiy A. V., , , Prokhorov General Physics Institute, Russian Academy of Sciences, 38 Vavilov str., Moscow, 119991, Russia
Konov V. I., , , Prokhorov General Physics Institute, Russian Academy of Sciences, 38 Vavilov str., Moscow, 119991, Russia
Ashkinazi Е. Е., , , Prokhorov General Physics Institute, Russian Academy of Sciences, 38 Vavilov str., Moscow, 119991, Russia
Khomich А. А., , , Prokhorov General Physics Institute, Russian Academy of Sciences, 38 Vavilov str., Moscow, 119991, Russia
Sharonov G. V., , , A. N. Sevchenko Research Institute of Applied Physical Problems of the BSU, 7 Kurchatov str., Minsk, 220064, Belarus
Khmelnitskiy R. A., , , Lebedev Physical Institute of the Russian Academy of Sciences, 53 Leninskij prospekt, Moscow, 119991, Russia
Zavedeev E. V., , , Prokhorov General Physics Institute, Russian Academy of Sciences, 38 Vavilov str., Moscow, 119991, Russia
Khomich А. V., , , Institute of Radioengineering and Electronics (IRE) of the Russian Academy of Sciences, 1 Vvedensky sq. 1, Fryazino, Moscow region, 141120, Russia
Sovyk D. N., , , Prokhorov General Physics Institute, Russian Academy of Sciences, 38 Vavilov str., Moscow, 119991, Russia
- Keywords
- single crystal / diamond / epitaxy / CVD process / microwave plasma / photoluminescence / cathodoluminescence
- Year
- 2011 Issue 6 Pages 104 - 110
- Code EDN
- Code DOI
- Abstract
- Microwave plasma (2.45 GHz) was used to deposit the single crystal diamond layers with a deposition rate up to 40 µm/h on natural and HPHT monocrystalline substrates with deposition surface (100) and dimensions up to 5×5 mm. The deposited layers structure and defect/impurities composition have been studied by Raman and photoluminescence spectroscopy, cathode luminescence spectroscopy, electron and optic microscopy. The high quality of the synthesized layers has been confirmed.
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