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- Article name
- About mechanism of decreasing the microdefects at diffusion of phosphorus
- Authors
- Klimanov E. A., , orion@orion-ir.ru, Orion R&P Association, 46/2 Enthusiasts road, Moscow, 111402, Russia
- Keywords
- defect / silicon / gettering / phosphorus / diffusion
- Year
- 2011 Issue 6 Pages 133 - 137
- Code EDN
- Code DOI
- Abstract
- The paper devotes to mechanism of decreasing the microdefects in silicon by gettering a diffusion layer of phosphorus.
- Text
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