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- Article name
- Investigation of the process of chemical-mechanical polishing of zinc selenide using the aqueous solutions of inorganic acids and bases
- Authors
- Timofeev O.V., , timofeev@ihps.nnov.ru, Institute of Chemistry of High-Purity Substances RAS, Nizhniy Novgorod, Russia
Vilkova E. Ju., , , Institute of Chemistry of High-Purity Substances RAS, Nizhniy Novgorod, Russia
- Keywords
- polishing / zinc selenid / water solution / acid
- Year
- 2010 Issue 5 Pages 89 - 93
- Code EDN
- Code DOI
- Abstract
- A process of chemical-mechanical polishing of zinc selenide is investigated using aqueous solutions of inorganic acids and bases of different concentrations as a chemically active component. On the basis of the obtained results a technique for chemical-mechanical polishing of polycrystalline zinc selenide is developed.
- Text
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