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- Article name
- Creation of the superpure vacuum technological environment in electronic manufacture
- Authors
- Vasin V. A., , vacuumwa@list.ru; vacuumwa@ya.ru, Moscow State Institute of Electronics and Mathematics, 3 B. Trekhsvyatitel'skiy al., Moscow, 109028, Russia
Ivashov E. N., , vacuumwa@list.ru; vacuumwa@ya.ru, Moscow State Institute of Electronics and Mathematics, 3 B. Trekhsvyatitel'skiy al., Moscow, 109028, Russia
Kuznetsov P. S., , vacuumwa@list.ru; vacuumwa@ya.ru, Moscow State Institute of Electronics and Mathematics, 3 B. Trekhsvyatitel'skiy al., Moscow, 109028, Russia
Stepanchikov S. V., , vacuumwa@list.ru; vacuumwa@ya.ru, Moscow State Institute of Electronics and Mathematics, 3 B. Trekhsvyatitel'skiy al., Moscow, 109028, Russia
- Keywords
- superpure vacuum technological environment / vacuum equipment / introduced deficiency / topo- logy of microcircuits
- Year
- 2010 Issue 5 Pages 122 - 126
- Code EDN
- Code DOI
- Abstract
- Consideration is given to tendencies of development of the modern vacuum equipment and problem of creation of the superpure vacuum technological environment in electronic manufacture. The data on the minimum sizes of topology of microcircuits and intrachamber devices without knots of a friction with use for formation of efforts and movings of operated elastic deformation is cited. Such approach provides creation of the modern industry of high vacuum technologies.
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