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- Article name
- MATHEMATICAL MODELLING OF FORMATION OF AGGLOMERATES OF NANOPARTICLES IN THE PURE PREMISES OF MICROELECTRONICS
- Authors
- SEVRYUKOVA E. A., , melaly@rambler.ru, National Research University of Electronic Technology, "MIET", Moscow, Russia
Karakeyan V. I., , zelikar@mail.ru, National Research University of Electronic Technology, Moscow, Russia
- Keywords
- nanoparticles / the equations of Boltzmann-Smoluchowski / coagulation / Brownian motion
- Year
- 2011 Issue 3 Pages 50 - 55
- Code EDN
- Code DOI
- Abstract
- A mathematical modeling of the agglomeration of nanoparticles and the corresponding numerical and analytical solutions of kinetic equations is presented. The possibility of describing the slow and fast coagulation in the gas, given the restrictions imposed on the dispersion system in constructing a mathematical model of coagulation is shown.
- Text
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