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- Article name
- THE THERMAL CONVERSION DETECTOR BASED ON MEMS-TECHNOLOGY
- Authors
- Timofeev V. N ., , dtm@miee.ru, Moscow Institute of Electronic Technology (Technical University), Moscow, Russia
Terehin I. V., , Terehin-gas@yandex.ru, Moscow Institute of Electronic Technology (Technical University) , Moscow, Russia
Sajnev S. V. , , gas@eltochpribor.ru, Eltochpribor Ltd., Moscow, Russia
- Keywords
- chromatography / detector of thermal conductivity / MEMS-technology
- Year
- 2011 Issue 1 Pages 20 - 24
- Code EDN
- Code DOI
- Abstract
- The device detector thermal conversion based on sensors fabricated by MEMS-technology was considered. The method of determining the noise signal and the detection limit is shown. Some characteristics and the dependence of the device are presented. The comparative analysis of some characteristics of the detector crystals of silicon with characteristics of standard detector filament threads is given.
- Text
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