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- Article name
- ANALYSIS OF POLLUTANT EMISSIONS INTO THE ATMOSPHERE IN A CYCLE OF MANUFACTURE OF PHOTOMASKS IN CLEAN ROOMS
- Authors
- EGORKINA R. Yu., , regina.egorkina@bk.ru, Radis Ltd, Moscow, Russia
SEVRYUKOVA E. A., , melaly@rambler.ru, National Research University of Electronic Technology, "MIET", Moscow, Russia
- Keywords
- polluting substances / atmosphere / air / clean room / from / ingredient / installation
- Year
- 2012 Issue 3 Pages 27 - 29
- Code EDN
- Code DOI
- Abstract
- The article provides an analysis of emissions of polluting substances in atmospheric air in a cycle of manufacture of photomasks in clean industrial premises.
- Text
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