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- Article name
- ON ADEQUACY OF PROBE PLASMA DIAGNOSTICS
- Authors
- Riaby V. A., , riame@sokol.ru, RIAME MAI, Moscow, Russia
Obukhov V. A., , riame@sokol.ru, RIAME MAI, Moscow, Russia
- Keywords
- RF-plasma / charged particles / probe / volt-ampere characteristics / electron energy distribution function / temperature and concentration of electrons / space potential / sheath of space charge
- Year
- 2012 Issue 3 Pages 50 - 55
- Code EDN
- Code DOI
- Abstract
- Problems of probe diagnostics in gas discharge plasma have been considered focusing on the ways and correctness criteria of their solution. It is found out that presently the art of this diagnostics method has achieved high degree of reliability and sophistication. Objectivity of its results has been established through comparison of joint measurements of electron energy distribution functions using Langmuir probe and spectral line-ratio methods in the same experiments. Mutual agreement of the obtained results had been assumed as an evidence for objectivity of both plasma diagnostics methods.
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