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- Article name
- Evaluation of the impact of the activities of the enterprise conducting photomasks on the environment
- Authors
- EGORKINA R. Yu., , regina.egorkina@bk.ru, Radis Ltd, Moscow, Russia
SEVRYUKOVA E. A., , melaly@rambler.ru, National Research University of Electronic Technology, "MIET", Moscow, Russia
- Keywords
- atmosphere / air / clean room / photomask
- Year
- 2012 Issue 4 Pages 32 - 34
- Code EDN
- Code DOI
- Abstract
- Assess the environmental impact of the production of photomasks for integrated circuits (IC). Calculate low-level concentrations using program complex "Prizma". Calculated parameter describing the amount of emitted substances for ten contaminants. Analysis of scattering in situ concentrations of pollutants at the edge of the buffer zone.
- Text
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