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- Article name
- Environmental aspects of integrated management of quality of microclimate in clean rooms
- Authors
- EGORKINA R. Yu., , regina.egorkina@bk.ru, Radis Ltd, Moscow, Russia
SEVRYUKOVA E. A., , melaly@rambler.ru, National Research University of Electronic Technology, "MIET", Moscow, Russia
- Keywords
- atmosphere / air / clean room / photomask / ecological aspects / designer workplace / nature management
- Year
- 2012 Issue 4 Pages 35 - 36
- Code EDN
- Code DOI
- Abstract
- Provides an overview and analysis of requirements to the ecology of workplace designer and engineer the manufacturer taking into account the need to observe the purity of production facilities. Significant environmental aspects are analyzed to create optimal and comfortable working conditions in the workplace of a designer.
- Text
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