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- Article name
- Measuring nanoparticles in the atmosphere and indoor air
- Authors
- SEVRYUKOVA E. A., , melaly@rambler.ru, National Research University of Electronic Technology, "MIET", Moscow, Russia
- Keywords
- atmosphere / aerosol / air / measuring the concentration of nanoparticles / the device / the size of the counter
- Year
- 2011 Issue 3 Pages 33 - 37
- Code EDN
- Code DOI
- Abstract
- The methods and devices for measuring the concentration and size of nanoparticles in the air space microelectronics technology. The description of systems for monitoring clean rooms in accordance with high requirements for cleanliness of the technological environment to ensure the quality of microelectronic products.
- Text
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