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- Article name
- Firmly lubricant coverings for improvement of ecology of the vacuum technological environment in electronic manufacture
- Authors
- Stepanchikov S. V., , vacuumwa@list.ru, Moscow State Institute of Electronics and Mathematics, 3 B. Trekhsvyatitelsky Lane, Moscow, 109028, Russia
IVASHOV E. N., , ienmiem@mail.ru, Moscow State Institute of Electronics and Mathematics, Moscow, Russia
VASIN V. A., , vacuumwa@list.ru, vacuumwa@ya.ru, Moscow State Institute of Electronics and Mathematics (Technical University), Moscow, Russia
- Keywords
- ecology of the vacuum technological environment / electronic manufacture / firm lubricant coverings / coatings based on solid lubricants / wear-out rate / gas absorber
- Year
- 2011 Issue 3 Pages 59 - 63
- Code EDN
- Code DOI
- Abstract
- The firm lubricant coverings intended for improvement of ecological parameters of the vacuum equipment of electronic manufacture are offered. Results of experimental researches of frictional characteristics of firm lubricant coverings are presented. Is constructive-technological decisions of basic knots of the mechanical systems are developed, allowing to improve ecology of the vacuum technological environment.
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