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- Article name
- Studying of properties of nanodimensional coatings inherited during forming process
- Authors
- KAMENEVA A. L., , , Research Center of Power Materials Science of the State Educational Establishment of the Higher Vocational Training "Perm State Technical University", Perm, Russia
- Keywords
- Year
- 2006 Issue 4 Pages 231 - 234
- Code EDN
- Code DOI
- Abstract
- The specialties of forming of nanostructure thin films are searched. The physic-chemical interaction in the thin films based on Ti-B-Si-N is studied. Dependence of crystal structure on the technology parameters is investigated. The peculiarities of the forming processes of films are studied.
- Text
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